Comparison ledger
ASML Twinscan XT 1400 F, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | ASML | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML Twinscan XT 1400 | Ultratech 1000 Family |
| Specifications | ||
| Configuration | 193nm (ArF)[1] | — |
| Make | ASML[1] | — |
| Model | Twinscan XT 1400 F[1] | — |
| Category | Lithography[2] | — |
| Wafer Sizes | 12 inch[1] | — |
| Wavelength | 193 nm[1] | — |
| Process Module | 200 mm[2] | — |
| Conversion Kit | 300 mm[2] | — |
| Resolution | 65 nm[3] | — |
| Numerical Aperture | 0.65 to 0.93[3] | — |
| Throughput | 133 wph (@125 exp per wafer)[3] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[4] |
| Optical design | — | Wynne Dyson[4] |
| Magnification | — | 1X[4] |
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