Comparison ledger
Applied Materials VIISta 810 XEri, Varian EHPI E 220, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VIISta 810 XEriApplied Materials | EHPI E 220Varian |
|---|---|---|
| OEM | Applied Materials | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials VIISta 810 | Varian EHPI E 220 |
| Specifications | ||
| Configuration | Medium Current[1] | Medium Current[2] |
| Wafer Size | 12-inch[1] | — |
| Implant Current Category | Medium Current[1] | — |
| SMIF Interface | — | Varian Interface for Brooks SMIFS[2] |
| Line Voltage | — | 3 Phase, 208 V[2] |
| Line Frequency | — | 50 / 60 Hz[2] |
| UPS | — | CVCS[2] |
| Gas Box | — | 4 Sticks, HP and SDS 2 in use[2] |
| HE MFC Size | — | Optional[2] |
| Type | — | Cryopump on board 4 f[2] |
| Cassette Stage | — | 200 mm (8") Standard[2] |
| Wafer Mapping | — | Optical Sensor[2] |
| Lamp Colors | — | Red, Orange, Green[2] |
| Chiller | — | Heat Exchange[2] |
| DI Cart | — | EHPI with B-Pure Filters[2] |
| Make | — | Varian[2] |
| Model | — | EHPI E 220[2] |
| Category | — | Ion Implantation[3] |
| Wafer Sizes | — | 8 inch[2] |
| System description | — | 8-inch, medium-current system with a SMIF interface[3] |
| Vacuum | — | Cryopump on board 4 f[3] |
| Gas delivery | — | 4 Sticks, HP and SDS 2 in use[3] |
| Chambers | — | 2[2] |
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