Waferpedia

Comparison ledger

Reflexion 5 Zversus100R16

Applied Materials Reflexion 5 Z, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Reflexion 5 ZApplied Materials
100R16Strasbaugh
OEMApplied MaterialsStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Reflexion 5 ZStrasbaugh 100R16
Specifications
type—1 spindle grinder/polisher[1]
drive system—DC drive system with 2 motors[1]
spindle RPM—1-180 RPM[1]
eccentric RPM—1-90 RPM[1]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[1]
capacity—16 inches[1]
spindle size—1-8 TPI[1]
overall dimensions—28 inches x 36 inches x 48 inches[1]
weight—500 lbs[1]
origin—made in the USA[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com