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PI 9500 XRversus200 PCU

Applied Materials PI 9500 XR, Axcelis 200 PCU, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
PI 9500 XRApplied Materials
200 PCUAxcelis
OEMApplied MaterialsAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2000 Vintage
Control system——
Generation——
FamilyApplied Materials PI 9500Axcelis NV GSD 200
Cited variants—
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
Specifications
Configuration6" Wheel Only[3]—
P/N—SC 4840 A[4]
Frequency—50 Hz[4]
Phase—3 Phase[4]
Voltage—400 V[4]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing
  4. [4]inventory listing