Comparison ledger
Applied Materials 0041-39086 ESC Part, Tegal 1511e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | 1511eTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | three- to six-inch wafers |
| Process node | — | — |
| Introduced | — | 1984 |
| Production run | — | 1984– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Tegal 1511e |
| Specifications | ||
| tool type | — | tri-electrode dual-frequency plasma etch system[1] |
| wafer size | — | three- to six-inch wafers[1] |
| first sold | — | 1984[1] |
| system characteristic | — | first vacuum-loadlocked dual-frequency tri-electrode etch system[1] |
| First vacuum-loadlocked dual-frequency tri-electrode etch system | — | Yes[1] |
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