Waferpedia

Comparison ledger

0041-39086 ESC PartversusP 5000 MxP+

Applied Materials 0041-39086 ESC Part, Applied Materials P 5000 MxP+, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
P 5000 MxP+Applied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials P 5000 MxP+
Specifications
Voltage—208 V, 125.0 A, 50/60 Hz, 3 Phase[1]
Largest Load Ampere Rating—125 Amps[1]
MAximum Ampere Rating—90 KVA[1]
Full Load Current—250 Amps[1]
Interrupt Current—10,000 Amps I.C.[1]
Wafer Set Size—8"[1]
Chamber A—MxP+ Etch[1]
Chamber B—MxP+ Etch[1]
Chamber C—MxP+ Etch[1]
Configuration—Chamber A:[1]
RF Generator—OEM 12 B[1]
Baraton—1 Torr[1]
Slit Valve—Standard[1]
Baratron—1 Torr[1]
Make—Applied Materials[1]
Model—P 5000 MxP+[1]
Category—Etcher[1]
Wafer sizes—8, 6 inch[1]
Wafer set size—6"[2]
Chamber A RF generator—OEM 12 B[1]
Chamber B RF generator—OEM 12 B[1]
Chamber C RF generator—12 B[1]
Electrical requirement—Line voltage 200/208 V[1]
Mainframe type—Standard[1]
Robot type—MK II[1]
Load lock cassette—Manual 2 Cassette[1]
Storage elevator—15 slots[1]
Power rack—Shrink[1]
Line Frequency—50/60 Hz[1]
Line Voltage—200/208 V[1]
Line Amperage—123 Amps[1]
3rd Monitor—Penulator[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing