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Comparison ledger

0021 32427 Partversus253B-2-50-2

Applied Materials 0021 32427 Part, YES 253B-2-50-2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 32427 PartApplied Materials
OEMApplied MaterialsYES
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 32427 PartYES 253B-2-50-2
Cited variants—
Specifications
ConfigurationCooling Plare, Countermatch,300mm Produc[2]—
Product name—MKS Type 253B Exhaust Throttle Valve[1]
Valve type—butterfly valve[1]
Function—regulate gas removal from a vacuum chamber[1]
Controller compatibility—Type 651, 652, 152G, or 252 (revision D or later) controllers[1]
Connector—15-pin Type D connector[1]
Flange types—ASA, KF Style ISO, NW Style ISO, CF, JIS[1]
Maximum differential pressure across valve—1 atm (15 psig) max[1]
Heated valve body operating temperature—80° to 90° C (176° to 194° F) for 20° to 40° C (68° to 104° F) ambient[1]
Power input—±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[1]
Resolution—Standard: 1/10,000; Fast Motor Option: 1/2800[1]
Speed (open to close)—Standard: 7.5 sec; Optional: < 2 sec[1]
Valve body operating temperature—0° to 90° C (32° to 194° F) max[1]
Valve motor ambient operating temperature—0° to 70° C (32° to 158° F) max[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]inventory listing