Waferpedia

Comparison ledger

0020 17485 PartversusTurboDisc K 465 GaN MOCVD

Applied Materials 0020 17485 Part, Veeco TurboDisc K 465 GaN MOCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMApplied MaterialsVeeco
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartVeeco TurboDisc K 465
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]K465 GaN Turbo disk[2]
Phase—3 Phase[2]
Voltage—400 Vac, 280 A, 50/60 Hz[2]
Make—Veeco[2]
Model—TurboDisc K 465[2]
Equipment type—GaN MOCVD (Metal Organic Chemical Vapor Deposition)[2]
Alternative designation—TurboDisc K465 GaN Turbo disk[2]
Electrical requirements—3 Phase, 5 Wire, 400 Vac, 280 A, 50/60 Hz[2]
Vintage—2009[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing