Waferpedia

Comparison ledger

0020 12458 PartversusUnity EP

Applied Materials 0020 12458 Part, Tokyo Electron Unity EP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
Unity EPTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartTokyo Electron Unity
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[1]For Parts[2]
Asset number146526[1]—
MakeApplied Materials[1]—
Model0020 12458[1]—
Wafer size—200mm[3]
Process type—Chemical Vapor Deposition (CVD)[2]
Chamber configuration—TiN chamber x3 (as listed)[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]grandbird.netgrandbird.net