Waferpedia

Comparison ledger

0020 12458 PartversusEndura CL

Applied Materials 0020 12458 Part, Applied Materials Endura CL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
Endura CLApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartApplied Materials Endura
Cited variants—
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[4]Preclean[1]
Asset number146526[4]—
MakeApplied Materials[4]Applied Materials[1]
Model0020 12458[4]Endura CL[1]
Phase—3 Phase[5]
Voltage—400V[5]
Chamber E—Degas[5]
Chamber F—Degas[5]
SUB Rack—BULE Distribution Rack[5]
Chamber—D (PC-XT), 1 (IMP), 2/3 (TxZ)[6]
OEM—Applied Materials[1]
Equipment type—Chamber[1]
Chamber configuration—Preclean[1]
Vintage—2002[1]
Product detail—Preclean 2002 Vintage[1]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (8)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]Equipment inventory listing