Comparison ledger
Applied Materials 0010 47763, Ulvac NE 950 ICP-RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | NE 950 ICP-RIEUlvac |
|---|---|---|
| OEM | Applied Materials | Ulvac |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Ulvac NE 950 |
| Specifications | ||
| Configuration | 2nd Source New[1] | Gas Box:[4] |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | — |
| OEM | Applied Materials[1] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| Gas 1 Horiba STEC SEC-E40 Ar | — | 100SCCM[4] |
| Gas 2 Horiba STEC SEC-E40 O2 | — | 100SCCM[4] |
| Gas 3 Horiba STEC SEC-E40 CHF3 | — | 100SCCM[4] |
| Cooling Gas | — | MKS 649A 50SCCM[4] |
| Match Box 1 | — | AMV-1000-12.5M-CT[4] |
| Match Box 2 | — | AMV-1000-AV3[4] |
| Valve | — | MKS T3PIA 26696[4] |
| Gauge | — | MKS E28D[4] |
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