Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Pfeiffer TPU 170 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | TPU 170 TurbomolecularPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Pfeiffer TPU |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | — |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Pumping Speed | — | 170 l/s[3] |
| Oil Filling | — | 2 × 6 cm³[3] |
| Type | — | Turbomolecular vacuum pump[4] |
| Weight | — | 20 lbs[5] |
| Ultimate pressure | — | 1 x 10 -9 mbar[6] |
| Inlet flange | — | DN 100 CF / CF flange[6] |
| Cooling requirement | — | 15 l/h at watertemperatur 15C[7] |
| Pumping speed | — | 170 liters per second[7] |
| Ultimate Pressure | — | 1×10⁻⁹ mbar[6] |
| Inlet Flange | — | DN 100 CF[6] |
| Cooling Requirement | — | 15 l/h at 15 °C water temperature[3] |