Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Mattson AST 2800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | AST 2800Mattson |
|---|---|---|
| OEM | Applied Materials | Mattson |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Mattson AST 2800 |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | AST 2800[3] |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Manufacturer | — | Mattson[3] |
| Category | — | Thermal / Diffusion[4] |
| System type | — | rapid thermal process system[5] |
| Configuration | — | SMIF RTP[4] |
| Control software | — | DOS 2.0[4] |
| Wafer handling | — | PRI Robot ATM307[4] |
| Phase | — | 3 phase[4] |
| Configuration / options | — | Refurbished[5] |