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0010-22161 High EFF RF MatchversusiXH 1220 HTX

Applied Materials 0010-22161 High EFF RF Match, Edwards iXH 1220 HTX, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEdwards IXH
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Main Input—3-200-230V[3]
Configuration—30/50Hz[4]
Type of product—dry pump[5]
Inlet—ISO100[5]
Exhaust—KF40[5]
Pumping speed—735.72 CFM[5]
Ultimate pressure—3.7 x 10^-3 Torr[5]
Weight—1,007 lbs[5]
Frequency—30/50Hz[3]
Current—38A[3]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com