Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards IQDP 80 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | IQDP 80 DryEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards IQDP 80 Dry |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[3] | Edwards[7] |
| Model | 0010-22161[3] | IQDP 80[7] |
| Description | HTESC PH 1 REV A[4] | — |
| Condition | Used[4] | — |
| Stock Number | BM6628[4] | — |
| Typical Peak Pumping Speed (60Hz) | — | 96 m3/h-1[2] |
| Pumping Speed (60Hz) | — | 56.5 CFM[5] |
| Pumping Speed (50Hz) | — | 47 CFM[6] |
| Ultimate Vacuum (60Hz) | — | 7.5 x 10-3 Torr[5] |
| Ultimate Pressure (50Hz) | — | 2.3 x 10-2 Torr[6] |
| Maximum Continuous Inlet Pressure | — | 1x10*5 Pa[2] |
| Inlet Connection | — | ISO 63[5] |
| Outlet Connection | — | NW 40[2] |
| Exhaust Connection | — | KF40[5] |
| Motor | — | 3 Phase, 200-460V, 50/60Hz[5] |
| Weight (lbs) | — | 477 lbs[5] |
| Weight (kg) | — | 216 Kg[6] |
| Noise Level at 1 m | — | < 70 dB(A)[6] |
| Warm-up Time to Nominal Pumping Performnce | — | 15 min[6] |
| Type | — | Dry Pump[7] |
| Typical peak pumping speed | — | 96 m3/h at 60Hz[2] |
| Ultimate vacuum | — | 3 x 10-2 mbar[1] |
| Displacement | — | 310 m3h-1[1] |
| Pump stages | — | Four-stage[1] |
| Pump mechanism | — | Positive displacement dry pump with intermeshing rotors on common shafts held in phase by timing gears[1] |
| Cooling | — | Indirect cooling system; pump motor is water cooled[1] |
| Gas module | — | Gas Module introduces purge gas into the iQDP pump[1] |
| Control options | — | Pump Display Module, Interface Module, or iQSingle Pumpset Monitor[1] |
| Cooling motor note | — | Both the iQDP and QMB pumps have enclosed, water-cooled motors[1] |
| Equipment type | — | Dry vacuum pump[7] |