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0010-22161 High EFF RF MatchversusACU 200

Applied Materials 0010-22161 High EFF RF Match, Axcelis ACU 200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
ACU 200Axcelis
OEMApplied MaterialsAxcelis
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
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FamilyApplied Materials 0010-22161 High EFF RF MatchAxcelis ACU 200
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]ACU 200[3]
DescriptionHTESC PH 1 REV A[2]Microwave asher[4]
ConditionUsed[2]—
Stock NumberBM6628[2]—
Manufacturer—Axcelis[3]
Equipment type—Asher[3]
Wafer size—200 mm[4]
Chambers—Single chamber[4]
Included component—Microwave generator[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]auction.fabexchange.comauction.fabexchange.com