Comparison ledger
Applied Materials 0010-21246 Part, SUSS MicroTec Delta 12 AQ Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | Delta 12 AQ SpinSUSS MicroTec |
|---|---|---|
| OEM | Applied Materials | SUSS MicroTec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | SUSS MicroTec Delta 12 AQ Spin |
| Specifications | ||
| Maximum wafer diameter | — | 200 mm[1] |
| Maximum substrate thickness | — | 5 mm[1] |
| Supported wafer diameters | — | 50 mm, 75 mm, 100 mm, 150 mm, 200 mm[1] |
| Supported photomask sizes | — | 125 mm x 125 mm, 150 mm x 150 mm[1] |
| Supported developer chemistries | — | AZ400K, AZ300MIF, CD26[1] |
| Operation type | — | Recipe controlled automated operation[1] |
| Developer temperature control | — | Precise control[1] |
| Substrate handling | — | Cassette-to-cassette dry in-dry out[1] |