Waferpedia

Comparison ledger

0010-21246 PartversusSST 421 Spray Solvent

Applied Materials 0010-21246 Part, Semitool SST 421 Spray Solvent, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsSemitool
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Semitool SST 421 Spray Solvent
Specifications
Voltage—400 Vac / 35 A[1]
Model—SST-421[2]
Manufacturer—Semitool[3]
Description—Spray Solvent Tool[4]
Tool type—Automated Spray Solvent Tool (SST)[2]
Process role—Batch Solvent Processor for Wafer Cleaning[2]
Wafer size—8"/200mm[2]
Number of tanks—4[6]
Number of heated tanks—2[6]
Single chamber—Yes[2]
Rotor included—1 rotor included[2]
OEM—Semitool[3]
Process type—Batch solvent processor for wafer cleaning[2]
Process applications—Polymer removal, resist stripping, wafer cleaning, metal lift-off[2]
Max wafer size—8"/200mm wafers[2]
Max substrate size—8"/200mm[5]
Chambers—Single chamber[2]
Rotor—1 rotor included (select size at time of order)[2]
Tanks—4 stainless steel tanks (2 heated, 2 ambient)[2]
Operation—Automated spray solvent tool[2]
Sources (6)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]classoneequipment.comclassoneequipment.com
  3. [3]Equipment inventory listing
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]classoneequipment.comclassoneequipment.com
  6. [6]hfsemi.comhfsemi.com