Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusGamma2

Applied Materials 0010-18024 Pyrometer Assembly, Rudolph Gamma2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Gamma2Rudolph
OEMApplied MaterialsRudolph
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—Linux
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyRudolph Gamma2
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Function—Connects applications to tools for fault detection and run-to-run process control[2]
Communication—Communicates with semiconductor process tools; with or without a SECS communication port[2]
Hardware platform—Compact hardware platform[2]
Processor—X86 processor[2]
Operating system—Linux OS[2]
Storage—Hard drive[2]
I/O—Serial, ethernet, analog, and digital capabilities[2]
Data collection—Collects data directly from equipment sensors[2]
Equipment data routing—Routes equipment data to factory host or other applications[2]
SECS-I to HSMS—Enables SECS-I to HSMS communication[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org