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0010-18024 Pyrometer AssemblyversusSurfscan 6100 Wafer

Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan 6100 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Below Wafer
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA Surfscan
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]17A[2]
Phase—1 Phase[2]
Frequency—60 Hz[2]
Voltage—208 V[2]
Wafer size—Below Wafer[2]
Detection—0.16 micron on Bare Silicon[3]
Detection sensitivity—0.16 micron on Bare Silicon[3]
Laser type—HeNe Red Laser[2]
Laser wavelength—632 nm[2]
Power supply—208 V, 17 A, 1 Phase, 60 Hz[2]
CPU speed—800 MHz[2]
Storage type—Solid State Hard Drives[2]
Monitor type—LCD Color Monitor[2]
Detector type—PMT detector[2]
Computer interfaces—USB 2.0[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing