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Comparison ledger

0010-18024 Pyrometer AssemblyversusP-7

Applied Materials 0010-18024 Pyrometer Assembly, KLA P-7, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
P-7KLA
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA P-7
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
equipment type—Stylus profilometer[2]
equipment type category—Topographical Metrology[3]
equipment name as listed—Step Profilometer (KLA Tencor P-7)[3]
Step Height Range—Nanometers to 1000 µm[4]
Stylus Tip Radius—2 µm[5]
Stylus Bevel—60°[5]
Max Scan Length—150 mm[6]
Vertical Range—1 mm[6]
Sample Size—Up to 150 mm[6]
Sampling Rate—Higher sampling rates increase data resolution, but can introduce noise above 200 Hz[5]
Applied Force—0.03 to 50 mg[4]
Stylus Material—Diamond[4]
Phase—115–230 VAC - 50/60 Hz - 10–5 A - Single Phase - 3-Wire Power - 10,000 A SCCR Includes[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]tmi.utexas.edutmi.utexas.edu
  3. [3]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
  4. [4]kla.comkla.com
  5. [5]research.yale.eduresearch.yale.edu
  6. [6]pnf.uchicago.edupnf.uchicago.edu
  7. [7]inventory listing