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0010-18024 Pyrometer Assemblyversus9380 II CD-SEM

Applied Materials 0010-18024 Pyrometer Assembly, Hitachi 9380 II CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsHitachi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyHitachi 9380 II CD-SEM
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Power Phase—Single Phase[2]
Vacuum Pump—Leybold/ TMP 340 ML /3[2]
Power Supply Unit—PS Unit (569-6546)[2]
Software Version—26.23[2]
Port Configuration—12" E3 Port / 8" OCL2300 Port[2]
Number of FOUR Ports—3[2]
Chiller—Hitachi / W-5010 T[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com