Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Chroma 7940, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | 7940Chroma |
|---|---|---|
| OEM | Applied Materials | Chroma |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Grip Ring Holder or Wafer frame |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Chroma 7940 |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | 25M Color CMOS Camera (top side)[2] |
| Wafer size | — | Grip Ring Holder or Wafer frame[2] |
| Inspection Area | — | Max 8" for 6" expanding wafer[2] |
| Chip Size | — | 1.2mm x 1.2mm - 3.1mm x 3.1 mm[2] |
| DUT Package | — | VCSEL[2] |
| 2X | — | 1.28um/pixel (Resolution)[2] |
| 5X | — | 0.51um/pixel (Resolution)[2] |
| Chip Size Range | — | 1.2mm x 1.2mm - 3.1mm x 3.1mm[2] |
| Camera | — | 25M Color CMOS Camera (top side)[2] |
| Light Source | — | LED Co-Axis Lighting , Ring Lighting , Back Lighting[2] |
| Objective Lens (programmable) | — | 2X: 1.28um/pixel (Resolution); 5X: 0.51um/pixel (Resolution)[2] |
| Auto Focus (correct warpage) | — | Yes[2] |
| Auto Rotation | — | Yes[2] |
| Edge Detection | — | Yes (incomplete wafers)[2] |
| Auto Cassette Load ports | — | Yes[2] |
| Customized Algorithm Capability | — | Yes[2] |
| Industrial Computer | — | i7 / 32GB RAM / 2TB HD or better[2] |
| Defect Detection Rate | — | >98%[3] |
| Wafer Inspection Time | — | up to 6" wafer in 3 minutes[4] |
| Throughput | — | up to 15 msec./chip[4] |
| Resolution | — | 2X: 1.3μm/pixel; 5X: 0.5μm/pixel[4] |
| Minimum Detectable Defect Size | — | 1.5μm[4] |
| Magnifications | — | 2X and 5X[4] |
| Top Side Camera | — | 25M Color CMOS Camera[2] |
| Bottom Side Camera | — | 25M Color CMOS Camera[2] |
| Objective Lens (programmable) 2X | — | 1.28um/pixel (Resolution)[2] |
| Objective Lens (programmable) 5X | — | 0.51um/pixel (Resolution)[2] |
| Edge Detection (incomplete wafers) | — | Yes[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →