Comparison ledger
Applied Materials 0010-13622 RF Match for, Leybold CCS pro AR, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | CCS pro ARLeybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Leybold CCS pro AR |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | 1x HPE6 Egun with 7 pockets[2] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Phase | — | 3 Phase[2] |
| Voltage | — | 400 V AC[2] |
| Frequency | — | 50 Hz[2] |
| Power | — | 20 KVA[2] |
| Mechanical pump | — | Leybold D65B[2] |
| High vacuum pump | — | Turbomolecular[2] |
| E-gun | — | 1x HPE6 Egun with 7 pockets[2] |
| Ion source | — | 1x MkI ion source[2] |
| Dome tooling | — | Dome tooling[2] |
| Polycold | — | Polycold[2] |
| Domes | — | 2 domes[2] |
| Drop rings | — | 2 sets of drop rings[2] |
| Dome holder for loading | — | 1 dome holder for loading[2] |
| Spare set of shields | — | Spare set of shields[2] |
| Manuals and documentation | — | Hard copies of manuals and documentation[2] |
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