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0010-03485 Magnet Assyversus253B-20-2CF-2

Applied Materials 0010-03485 Magnet Assy, YES 253B-20-2CF-2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsYES
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
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FamilyApplied Materials 0010-03485 Magnet AssyYES 253B-20-2CF-2
Cited variants—
Specifications
ConfigurationWP AL 300mm PVD[2]—
OEMApplied Materials[2]—
Model0010-03485[2]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]—
VersionSpares[5]—
Part Number0010-03485[2]—
ManufacturerApplied Materials[2]—
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Product name—MKS Type 253B Exhaust Throttle Valve[1]
Valve type—butterfly valve[1]
Function—regulates the removal of gas from a vacuum chamber; sealing versions can shut off the removal of gas[1]
Compatible controllers—Type 651, 652, 152G, or 252 revision D or later controllers[1]
Flange types—ASA, KF Style ISO, NW Style ISO, CF, JIS[1]
Connector—15-pin Type D connector[1]
Connector cable length—6-inch pigtail cable[1]
Heater operating temperature—80° to 90° C for 20° to 40° C ambient[1]
Power input for valve body heater—±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[1]
Resolution—Standard: 1/10,000; Fast Motor Option: 1/2800[1]
Shaft seal—Viton[1]
Speed (open to close)—Standard: 7.5 sec; Optional: < 2 sec[1]
Valve body operating temperature—0° to 90° C max[1]
Valve motor ambient operating temperature—0° to 70° C max[1]
Warm-up time—1 hour to 80° C; 2 hours to steady state[1]
Differential pressure across valve—1 atm. (15 psig) max[1]
Driver/gear assembly width—3.75 in square (95 mm)[1]
External leakage at shaft seal—1 x 10-7 scc/sec He[1]
Materials exposed to process—316L SS, Viton[1]
Closed leak rate for sealing butterfly valves—less than 1.3 x 10^-7 scc/sec when new[1]
Sources (5)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com