Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusDelta 12 AQ Spin

Applied Materials 0010-03485 Magnet Assy, SUSS MicroTec Delta 12 AQ Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
Delta 12 AQ SpinSUSS MicroTec
OEMApplied MaterialsSUSS MicroTec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssySUSS MicroTec Delta 12 AQ Spin
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Maximum wafer diameter—200 mm[5]
Maximum substrate thickness—5 mm[5]
Supported wafer diameters—50 mm, 75 mm, 100 mm, 150 mm, 200 mm[5]
Supported photomask sizes—125 mm x 125 mm, 150 mm x 150 mm[5]
Supported developer chemistries—AZ400K, AZ300MIF, CD26[5]
Operation type—Recipe controlled automated operation[5]
Developer temperature control—Precise control[5]
Substrate handling—Cassette-to-cassette dry in-dry out[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]nist.govnist.gov