Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusSST 421 Spray Solvent

Applied Materials 0010-03485 Magnet Assy, Semitool SST 421 Spray Solvent, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsSemitool
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssySemitool SST 421 Spray Solvent
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]Semitool[7]
Model0010-03485[1]SST-421[6]
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]Spray Solvent Tool[8]
ProcessPVD[3]—
Wafer size300mm[4]8"/200mm[6]
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]Semitool[7]
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Voltage—400 Vac / 35 A[5]
Tool type—Automated Spray Solvent Tool (SST)[6]
Process role—Batch Solvent Processor for Wafer Cleaning[6]
Number of tanks—4[10]
Number of heated tanks—2[10]
Single chamber—Yes[6]
Rotor included—1 rotor included[6]
Process type—Batch solvent processor for wafer cleaning[6]
Process applications—Polymer removal, resist stripping, wafer cleaning, metal lift-off[6]
Max wafer size—8"/200mm wafers[6]
Max substrate size—8"/200mm[9]
Chambers—Single chamber[6]
Rotor—1 rotor included (select size at time of order)[6]
Tanks—4 stainless steel tanks (2 heated, 2 ambient)[6]
Operation—Automated spray solvent tool[6]
Sources (10)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]waferpedia.comwaferpedia.com
  6. [6]classoneequipment.comclassoneequipment.com
  7. [7]Equipment inventory listing
  8. [8]fabsurplus.comfabsurplus.com
  9. [9]classoneequipment.comclassoneequipment.com
  10. [10]hfsemi.comhfsemi.com