Comparison ledger
Applied Materials 0010-03254 E Chuck, KLA M Gage 300 Film Thickness, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA M Gage 300 Film Thickness |
| Specifications | ||
| Measurement principle | — | Non-contact Eddy Current measurement[1] |
| Sheet resistance range | — | 1 ohm/sq to 1,999 ohm/sq; 1 mOhm/sq to 1,999 mOhm/sq[1] |
| Film thickness range | — | 100 Angstroms min to 270K Angstroms (calculated by DDC when resistivity is 2.7 uOhm-cm)[1] |
| Substrate diameter | — | 2”, 3”,4”,5”,6” standard wafers; 150mm (6”) wafers[2] |
| Substrate thickness | — | 200mm to 1000mm[2] |
| Repeatability | — | Total repeatability is the standard deviation percent of mean value, +/-1 count: 1 to 100 mOhm/sq and Ohm/sq: 1.0%; 100 to 500: 2.0%; 500 to 1,000: 4.0%; 1,000 to 1,999: 6.0%[2] |
| Display | — | 3 ½ Digit LED display, autoranges over three decades[1] |
| Measurement modes | — | Manual and Automatic modes; 5-point and 9-point multi-point measurements supported[2] |
| Units of measurement | — | Ohms per square or milliohms per square, switch selectable[1] |
| Resistivity range | — | 0.05 mOhm-cm to 100 mOhm-cm or 0.05 Ohm-cm to 100 Ohm-cm (for a 500 micrometer wafer)[2] |
| Power requirements | — | 110Vac, 50-60Hz, <15A[1] |
| Dimensions | — | Tester: 24cm (9.5”)W x 19cm (7”)H x 39cm (15.5”)D[1] |