Waferpedia

Comparison ledger

0010-03254 E ChuckversusPH 402 Environmental

Applied Materials 0010-03254 E Chuck, ESPEC PH 402 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsESPEC
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—ESPEC PH 402 Environmental
Specifications
Interior Volume—35.3 cubic feet (1000 liters)[1]
Interior Dimensions (W × D × H)—1000 × 1000 × 1000 mm[1]
Temperature Range—45°C to 200°C[1]
Type—Horizontal-type industrial oven[1]
Configuration—Power Requirements:[1]
Voltage—208 V (±5%)[1]
Phase—3-phase, 60 Hz[1]
Model—PH 402[1]
Manufacturer—ESPEC[1]
Service amps—30 service amps (19 FLA)[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing