Comparison ledger
Agilent 11980 A, Zygo MicroLUPI, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | MicroLUPIZygo |
|---|---|---|
| OEM | Agilent | Zygo |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Zygo MicroLUPI |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[1] | — |
| Laser | — | Type: frequency stabilized Helium-Neon laser with fiber[2] |
| Configuration | — | optic output[2] |
| Wavelength | — | 1550 nanometers[2] |
| Maximum Output Power | — | <1 milliwatt[2] |
| Output Power at Instrument Aperture | — | ≤1 milliwatt[2] |
| Test Beam Diameter | — | 3 mm[2] |
| Coherence Length | — | ≥10 meters[2] |
| Mounting | — | Dovetail[2] |
| Type | — | Infinity Corrected SLWD Mag. N.A. Working Dist.[2] |
| Motor | — | DC brushless, microstepper[2] |
| Drive | — | leadscrew[2] |
| Range | — | 6 in. (152 mm)[2] |
| Resolution | — | 4 μin. (0.1 μm)[2] |
| Maximum Velocity | — | 0.50 in/sec (12.7 mm/sec)[2] |
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