Comparison ledger
Agilent 11980 A, CyberOptics SQ3000-CMM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | SQ3000-CMMCyberOptics |
|---|---|---|
| OEM | Agilent | CyberOptics |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | CyberOptics SQ3000-CMM |
| Cited variants | — |
|
| Specifications | ||
| Wavelength Range | 1250-1600 nm[2] | — |
| Inspection speed | — | Standard MRS Sensor: 40 cm²/sec (2D+3D); High-Speed MRS Sensor: 50 cm²/sec (2D+3D); High-Resolution MRS Sensor: 20 cm²/sec (2D+3D); Ultra-High Resolution MRS Sensor: 15 cm²/sec (2D+3D)[1] |
| Field of view (FOV) | — | Standard MRS Sensor: 36 x 30 mm; High-Speed MRS Sensor: 36 x 36 mm; High-Resolution MRS Sensor: 26 x 26 mm; Ultra-High Resolution MRS Sensor: 21 x 21 mm[1] |
| Coordinate measurement capability | — | Line / Distance / X,Y / Mid Line, Inter Point / Regression Shifted, Datum X,Y / LSF X,Y Offset, X,Y Offset / Value / Location / List of X,Y Values, Height / Local Height / Regression Radius, Coplanarity / Distance to plane / 2nd Order fitting, Difference / Absolute / 2sqrt / VC, Max / Min / Ave / Sigma / Plus / Minus / Multiple[1] |
| X Y resolution | — | Standard MRS Sensor and High-Speed MRS Sensor: 10µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 7µm[1] |
| Z resolution | — | 0.5µm[1] |
| Accuracy XY | — | Standard MRS Sensor and High-Speed MRS Sensor: 6µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 5µm[1] |
| Accuracy Z | — | 2 μm[1] |
| Minimum feature size | — | Standard MRS Sensor and High-Speed MRS Sensor: 100µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 70µm[1] |
| Maximum feature size | — | SQ3000: 510 x 510 mm (20 x 20 in.); SQ3000-X: 710 x 610 mm (27.9 x 24 in.)[1] |
| Minimum feature height | — | 50 μm[1] |
| Maximum feature height | — | Standard MRS Sensor and High-Speed MRS Sensor: 24mm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 8mm[1] |
| Software | — | CyberCMM[3] |
| Technology | — | MRS technology / MRS-enabled technology[3] |
| Product type | — | Coordinate Measurement Applications[3] |
| Use case | — | Metrology applications in PCB, semiconductor, and consumer electronics manufacturing[3] |
| Measurement capabilities | — | Coplanarity, distance, height, and datum X,Y[3] |
| Setup time | — | Less than an hour for programming complex applications[3] |
| Multi-process capability | — | AOI, SPI, AOM, CMM[3] |
| Field of view | — | 36 x 30 mm; 36 x 36 mm; 26 x 26 mm; 21 x 21 mm depending on MRS sensor[1] |
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