Comparison ledger
Agilent 11980 A, Bruker contour-R1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | contour-R1Bruker |
|---|---|---|
| OEM | Agilent | Bruker |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Bruker contour-R1 |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[1] | — |
| Equipment type | — | Optical Profiler[2] |
| Equipment identifier | — | Inert-BRUKER-contour-R1[2] |
| Measurement principle | — | Optical (non-contact) 3D surface characterization; uses interference microscopy[3] |
| Vertical resolution (VSI mode) | — | ~3 nm[3] |
| Vertical resolution (PSI mode) | — | <0.1 nm[3] |
| Max. sample height | — | 100 mm[3] |
| Max. sample diameter | — | 150 mm[3] |
| Max. single measurement area | — | 1.0 mm x 1.0 mm (with stitching for larger areas)[3] |
| Measurement modes | — | Vertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI)[3] |
| Objectives | — | 10X and 50X on a software controlled motorized turret[3] |
| Field of view (FOV) lens | — | 0.55X and 2X[3] |
| Stage type | — | Motorized X-Y stage[3] |
| Software | — | Vision64 for automation and analysis[3] |
| Additional capabilities | — | Stitching algorithm for combining multiple images; handles rough surfaces, abrupt steps, slopes >60°, and low reflectance <0.5%[3] |
| Vendor | — | Bruker[3] |
| Model | — | Contour Elite I 3D optical metrology system[3] |
| Purpose | — | Optical (non-contact) 3D surface characterization of a wide range of substrates and devices[3] |
| Description | — | Optical profiler capable of generating three dimensional surface scans of a wide range of materials and devices[3] |
| Stage | — | Motorized X-Y stage positioning[3] |
| Maximum sample size | — | 150 mm diameter[3] |
| Maximum sample height | — | 100 mm[3] |
| FOV lenses | — | 0.55X and 2X[3] |
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