Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, EV Group 101 Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | 101 SprayEV Group |
|---|---|---|
| OEM | Accretech | EV Group |
| Category | — | — |
| Wafer size | Wafer Equipment | 2" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | EV Group 101 Spray |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Suitable for wafer sizes 2" - 4" (with proper chucks and pre-aligner).[2] |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | — |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| Configuration | — | Semi-Automatic, with Manual loading[2] |