Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, Accretech , Tokyo Semitsu Kogaku (TSK) UF3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | , Tokyo Semitsu Kogaku (TSK) UF3000Accretech |
|---|---|---|
| OEM | Accretech | Accretech |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | Accretech , Tokyo Semitsu Kogaku (TSK) UF3000 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | 300mm[2] |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| With Chiller | — | SCU-600B[2] |
| Section 1 | — | Tool General Information[2] |
| Section 2 | — | Tool Specific Information[2] |
| Manufacturer | — | Accretech, Tokyo Semitsu Kogaku (TSK)[2] |
| Model | — | UF3000[2] |
| Category | — | Wafer Equipment[2] |
| Equipment type | — | Wafer Prober[2] |
| Tool status | — | In production[2] |
| Tool location | — | Cleanroom[2] |
| Chiller | — | SCU-600B[2] |
| Vendor tool serial number | — | F24006MZ[2] |
| Micron MISTI/LID number | — | FE3SKAA300(TMM)[2] |
| Year | — | 2004[3] |
| Quantity | — | 9[4] |
| Short description | — | Fully Automated Prober[4] |
| Version | — | 300 mm[4] |
| Nickel chuck | — | 12 inch[4] |
| Front loading | — | 300 mm single FOUP loading[4] |
| Robot blade | — | Dual ceramic robot blade[4] |
| Software version | — | S5.0FC4[4] |
| Loader type | — | TSK[4] |
| Chuck temperature range | — | 30~150℃[4] |
| OCR camera type | — | Type6[4] |
| Auto card change | — | Yes[4] |
| Needle cleaning unit | — | 150 mm x 150 mm ceramics pad[4] |
| Manipulator | — | Hinge, MHF4000[4] |
| Test system interface | — | AL6050 & Focus3000[4] |
| Includes | — | Printer[4] |