Waferpedia

Comparison ledger

AP 3000 e Automatic Waferversus1007

Accretech AP 3000 e Automatic Wafer, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMAccretechKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech AP 3000KLA 1007
Cited variants—
Specifications
ConfigurationUltra High Performance[2]—
Wafer size200mm (8-inch) and 300mm (12-inch)[3]150 mm[4]
Overall precision+/-0.8 µm and +/-1.5 µm (Accretech specified condition)[3]—
Chuck temperature optionsAmbient, Hot up to 200°C, Low down to -55°C[3]—
Automatic probe card exchange (APC)Available as option[3]—
Loader configurationSingle or Dual loader with AMHS automation[3]—
Manufacturer—KLA[4]
Model—1007[4]
Description—Wafer Prober[4]
Convertible to 8 inch wafer size—Yes[4]
Vintage—01.06.1995[4]
Make—KLA[5]
Equipment type—Prober[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]accretech.comaccretech.com
  2. [2]inventory listing
  3. [3]accretech.com.myaccretech.com.my
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]Equipment inventory listing