Comparison ledger
ABM -407B-2-S-CE-S293 Robot, YES 253B-20-2CF-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | YES |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | YES 253B-20-2CF-2 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Product name | — | MKS Type 253B Exhaust Throttle Valve[1] |
| Valve type | — | butterfly valve[1] |
| Function | — | regulates the removal of gas from a vacuum chamber; sealing versions can shut off the removal of gas[1] |
| Compatible controllers | — | Type 651, 652, 152G, or 252 revision D or later controllers[1] |
| Flange types | — | ASA, KF Style ISO, NW Style ISO, CF, JIS[1] |
| Connector | — | 15-pin Type D connector[1] |
| Connector cable length | — | 6-inch pigtail cable[1] |
| Heater operating temperature | — | 80° to 90° C for 20° to 40° C ambient[1] |
| Power input for valve body heater | — | ±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[1] |
| Resolution | — | Standard: 1/10,000; Fast Motor Option: 1/2800[1] |
| Shaft seal | — | Viton[1] |
| Speed (open to close) | — | Standard: 7.5 sec; Optional: < 2 sec[1] |
| Valve body operating temperature | — | 0° to 90° C max[1] |
| Valve motor ambient operating temperature | — | 0° to 70° C max[1] |
| Warm-up time | — | 1 hour to 80° C; 2 hours to steady state[1] |
| Differential pressure across valve | — | 1 atm. (15 psig) max[1] |
| Driver/gear assembly width | — | 3.75 in square (95 mm)[1] |
| External leakage at shaft seal | — | 1 x 10-7 scc/sec He[1] |
| Materials exposed to process | — | 316L SS, Viton[1] |
| Closed leak rate for sealing butterfly valves | — | less than 1.3 x 10^-7 scc/sec when new[1] |