Comparison ledger
ABM -407B-1-S-CES293 Robot, Pfeiffer MVP 015 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MVP 015 VacuumPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Pfeiffer MVP |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Pumping Speed | — | 15 L/min[3] |
| Mass | — | 5.5 kg[3] |
| Power Consumption | — | 0.04 kW[3] |
| Voltage | — | 100 V, 50 Hz[3] |
| Type designation | — | MVP 015-2[1] |
| Supply voltage | — | 100 V, 50 Hz; 110 V, 60 Hz[3] |
| Input voltage | — | 100 – 115 / 208 – 236 V[1] |
| Rated current consumption | — | 1.1 A[1] |
| Rotation speed at 50 Hz | — | 1500 rpm[1] |
| Rotation speed at 60 Hz | — | 1800 rpm[1] |
| Final pressure without gas ballast | — | 3.5 hPa[1] |
| Intake pressure max. | — | 1100 hPa[1] |
| Exhaust pressure max. | — | 1100 hPa[1] |
| Ambient temperature | — | 5 – 40 °C[1] |
| Protection degree | — | IP20, Type 1[1] |
| Cooling method | — | Forced convection[1] |
| Weight | — | 6.5 kg[1] |