Waferpedia

Comparison ledger

-407B-1-S-CES293 RobotversusNWL 851 Wafer

ABM -407B-1-S-CES293 Robot, Nikon NWL 851 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMABMNikon
Category——
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FamilyABM -407B-1-S-CES293 RobotNikon NWL 851 Wafer
Specifications
ModelABM-407B-1-S-CES293[1]NWL 851[2]
DescriptionROBOT[1]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1]—
Objective lens—CF Plan 5 × BD NA0.135 / 10 × BD NA 0.30 / 50 × BD NA 0.80[2]
Eyepiece—CFIUW 10 /25 × 2 (magnification 10 ×, field of view 25 mm)[2]
Tube—3 erect images, with C-mount adapter[2]
Observation method—reflected bright field/reflected dark field[2]
Revolver—ACP 21 with motorized switching controller (5 holes)[2]
Stage—Large 8-inch compatible stage, lower right handle (clutch-free mechanism), X-Y stroke 205 mm, 8-inch rotating holder[2]
Illumination device—LA 150 UX (halogen lamp 150 W[2]
Make—Nikon[2]
Type—Wafer Loader[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]dealer listingsemistarcorp.com
  2. [2]inventory listing