Comparison ledger
Veeco Dektak, Zeiss sem2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DektakVeeco | sem2Zeiss |
|---|---|---|
| OEM | Veeco | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Veeco Dektak | Zeiss sem2 |
| Specifications | ||
| Manufacturer | Veeco[1] | — |
| Model | DEKTAK 150[1] | sem2[3] |
| Purpose | Stylus-based scanning system for measuring surface topography and thin film step heights[2] | — |
| Tip Size | 12 µm[1] | — |
| Standard Stylus Tip | 2.5 μm[2] | — |
| Scan Length | 55 - 200 mm[1] | — |
| Maximum Data Points per Scan | 120,000[1] | — |
| Maximum Sample Size | 200 mm[1] | — |
| Sample Diameter | up to 200 mm in diameter[2] | — |
| Sample Thickness | up to 90 mm thick[2] | — |
| Stylus Force | 1 - 15 mg[1] | — |
| X-Y Translation | 101.6 x 101.6 mm[2] | — |
| Stage Type | Two-axis, manual sample-positioning stage[2] | — |
| Stage Leveling and Rotation | Manual stage leveling and rotation[2] | — |
| Leveling | Two-point programmable or cursor software leveling[2] | — |
| Environmental Enclosure | Acrylic environmental enclosure[2] | — |
| Maximum sample thickness | 90 mm[2] | — |
| X-Y translation range | 101.6 x 101.6 mm[2] | — |
| Long scan length | 55 mm[2] | — |
| OEM | — | Zeiss[3] |
| Equipment name | — | Zeiss 200 mm Scanning Electron Microscope[3] |
| Category | — | Metrology & Inspection[3] |
| Equipment type | — | Scanning Electron Microscope[3] |
| Wafer size | — | 200 mm[3] |
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