Waferpedia

Comparison ledger

160 XPversusViision 80 Ion

Varian 160 XP, Varian Viision 80 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
160 XPVarian
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 160 XPVarian Viision 80
Cited variants
  • Viision 80 High Current[2]
Specifications
Configuration (160 XP Ion variant)150mm High Current IMP[1]—
Phase—3 Phase[3]
Configuration—5 Wire[3]
Voltage—208 V[2]
Power—35 kVA[2]
Electrical phase—3 Phase[3]
Electrical wires—5 Wire[3]
Voltage range—200-230 Vac[4]
Frequency—50/60 Hz[3]
Maximum current—50 A[2]
Full load current—95 Amps[2]
High current—Yes[2]
Wiring—5 Wire[3]
Current—95 Amps[2]
Max Current—50 A[2]
Type—High Current[2]
OEM—Varian[3]
Model—Viision 80[3]
Equipment type—Ion Implanter[3]
Electrical configuration—3 Phase - 5 Wire - 208 Volts - 50/60 Hz[3]
Vintage—1997[3]
Current class—High Current[2]

Plan your fab

Building a Ion Implantation process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing