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Comparison ledger

160 XPversusViision 80

Varian 160 XP, Varian Viision 80, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
160 XPVarian
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 160 XPVarian Viision 80
Cited variants—
Specifications
Configuration (160 XP Ion variant)150mm High Current IMP[1]—
Configuration—Medium Current[2]
Voltage—208 V[2]
Phase—3 Phase[2]
Power—45 kW[2]
Make—Varian[2]
Model—Viision 80[2]
Category—Ion Implantation[2]
Wafer Sizes—8 inch[2]
Electrical—208 V, 3 Phase, 5 Wire[2]
Vintage—2000[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing