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Comparison ledger

160 XP IonversusViision 80

Varian 160 XP Ion, Varian Viision 80, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 160 XP IonVarian Viision 80
Specifications
Configuration150mm High Current IMP[1]Medium Current[3]
OEMVarian[2]—
Model160 XP Ion[2]Viision 80[3]
CategoryIon Implantation[1]Ion Implantation[3]
Tool typeion implanter[1]—
Voltage—208 V[3]
Phase—3 Phase[3]
Power—45 kW[3]
Make—Varian[3]
Wafer Sizes—8 inch[3]
Electrical—208 V, 3 Phase, 5 Wire[3]
Vintage—2000[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing