Comparison ledger
Varian 0332 F 9453 302 Diffusion, YES 6112, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6112YES | |
|---|---|---|
| OEM | Varian | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | 8 in. wafers |
| Process node | — | — |
| Introduced | — | 2000 |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0332 F 9453 302 Diffusion | YES 6112 |
| Specifications | ||
| Asset Number | 142841[1] | — |
| Last Confirm Date | October 14, 2025[2] | — |
| Capacity | — | 4 cassettes of 8 in. wafers[3] |
| Cleanliness | — | < 10 x 0.5 - micron particles per 8-in. wafer[3] |
| Throughput | — | 2 full loads/hr.[3] |
| HMDS usage | — | <7 ml/200 wafers (>50 prime cycles/pint)[3] |
| Temperature | — | 160°C max[3] |
| Outer system | — | stainless steel[3] |
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