Waferpedia

Comparison ledger

0332 F 9453 302 DiffusionversusSoltec XPM 3 i 820

Varian 0332 F 9453 302 Diffusion, Vitronics Soltec XPM 3 i 820, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMVarianVitronics
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 0332 F 9453 302 DiffusionVitronics Soltec XPM
Specifications
Asset Number142841[1]—
Last Confirm DateOctober 14, 2025[2]—
Power—58 kWA[3]
Cycles—50/60 Hz[3]
Full Load—70 A[3]
Largest load—12 A[3]
Voltage—3X480 V[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fab-spares.comfab-spares.com
  3. [3]inventory listing