Comparison ledger
Tokyo Electron Clean Track Lithius Pro V i Resist, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Clean Track Lithius Pro V i ResistTokyo Electron | 1000FPYES |
|---|---|---|
| OEM | Tokyo Electron | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Clean Track | YES 1000FP |
| Specifications | ||
| Configuration | Multi Block[1] | — |
| Wafer size | 12 inch[1] | — |
| Function | Resist coater / developer[1] | — |
| Category | Wet Processing / Clean[2] | — |
| System type | — | Plasma cleaning system[3] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[3] |
| Model | — | Glen/YES 1000FP[3] |
| Designed use | — | Designed to accept a range of shelf sizes[3] |
| Application focus | — | Changing needs of the flat panel industry[3] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →