Waferpedia

Comparison ledger

Alpha 8 Sversus0332 F 9453 302 Diffusion

Tokyo Electron Alpha 8 S, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Alpha 8 STokyo Electron
OEMTokyo ElectronVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyTokyo Electron AlphaVarian 0332 F 9453 302 Diffusion
Cited variants
  • BBR3 DOPE[1]
  • WELL DRIVE HT FIELD OX[2]
  • D2 ANNEAL[3]
  • DENSIFICATION[4]
  • FSG ANNEAL[5]
—
Specifications
ConfigurationBBR3 DOPE[1]—
ProcessPOCL3[8]—
Vintage1999—
Furnaces / Diffusion Vintage1999—
Wafer Size8 inch[1]—
Asset Number—142841[9]
Last Confirm Date—October 14, 2025[10]

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Sources (10)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]Equipment inventory listing
  10. [10]fab-spares.comfab-spares.com