Comparison ledger
Thermo Fisher 1300 Series Safety, YES R3A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | R3AYES |
|---|---|---|
| OEM | Thermo Fisher | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | YES R3A |
| Specifications | ||
| Configuration | Class II[1] | — |
| Cabinet type | Class II, Type A2 biological safety cabinet[2] | — |
| Airflow compensation | SmartFlow airflow compensation system[2] | — |
| Motors | Dual DC motors[2] | — |
| Front window design | SmartClean front window design[2] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2] | — |
| UV light | Programmable UV light[2] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[2] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[2] | — |
| Front opening choices | 8-inch or 10-inch front opening[2] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[3] | — |
| Certification | NSF/ANSI 49, UL, CE[3] | — |
| Service valves | Up to 6 total, 3 on each side wall[3] | — |
| Model designation | — | Glen/YES R3A[4] |
| Alternate designation | — | YES-R3[4] |
| Series | — | R-Series plasma cleaning systems[4] |
| Position in series | — | smallest of the series[4] |
| Intended use | — | designed for pilot run quantities[4] |
| Sample trays | — | two 14 x 14 inch sample trays[4] |
| Total capacity | — | 390 square inches[4] |
| Power | — | 500W[5] |
| Frequency | — | 40kHz (low-frequency)[5] |
| Platen/Chamber Size | — | 14 x 14-inch, two-shelf configuration[5] |
| Operational Modes | — | Active Plasma, RIE, Downstream[5] |
| Process Type | — | Batch-process, low-frequency plasma cleaning[5] |
| Primary Application | — | Surface treatment including photoresist stripping (not primary use in Protofab)[5] |
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