Comparison ledger
Thermo Fisher 1300 Series Safety, Tokyo Electron Clean Track Act 8 Resist, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | Clean Track Act 8 ResistTokyo Electron |
|---|---|---|
| OEM | Thermo Fisher | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | 1998 Vintage year |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | Tokyo Electron Clean Track |
| Cited variants | — | |
| Specifications | ||
| Configuration | Class II[4] | Single Block[1] |
| Cabinet type | Class II, Type A2 biological safety cabinet[5] | — |
| Airflow compensation | SmartFlow airflow compensation system[5] | — |
| Motors | Dual DC motors[5] | — |
| Front window design | SmartClean front window design[5] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[5] | — |
| UV light | Programmable UV light[5] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[5] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[5] | — |
| Front opening choices | 8-inch or 10-inch front opening[5] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[6] | — |
| Certification | NSF/ANSI 49, UL, CE[6] | — |
| Service valves | Up to 6 total, 3 on each side wall[6] | — |
| System | — | Right to Left[7] |
| Main robot | — | 3 Pincette Arm[7] |
| Manufacturer | — | Tokyo Electron[1] |
| Model | — | Clean Track Act 8[1] |
| Type | — | Resist Coater / Developer[1] |
| Wafer Sizes | — | 6 inch, 8 inch[3] |
| Equipment type | — | Resist coater/developer[1] |
| Supported wafer sizes | — | 6 inch, 8 inch[1] |
| Supported Wafer Size | — | 8 inch[1] |
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