Comparison ledger
Temescal SuperSweep64, Temescal UEFC-4900, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SuperSweep64Temescal | UEFC-4900Temescal |
|---|---|---|
| OEM | Temescal | Temescal |
| Category | Deposition | Deposition |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2005 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Temescal SuperSweep64 | Temescal UEFC-4900 |
| Specifications | ||
| controller type | programmable beam sweep controller[1] | — |
| system association | listed under the FC-4400 system's electron beam source, power supply, and sweep section[1] | — |
| wafer capacity referenced in associated system | 30 150 mm wafers per load[1] | — |
| Type | programmable beam sweep controller[1] | — |
| Operation | fully digital operation[2] | — |
| Internal waveform storage | up to 64 patterns[2] | — |
| Addressable points | 1024[2] | — |
| Waveform types | sine, triangle, saw-tooth, clipped, and arbitrary[2] | — |
| Frequency range | 1 to 200 Hz[2] | — |
| Max. sweep current | -4 A to +4 A[2] | — |
| Power requirements | 100–240 V ac, 50–60 Hz[2] | — |
| Computer I/O ports | RS-232 and RS-485[2] | — |
| Compatible system | Temescal FC-4400 deposition system[3] | — |
| Compatibility | Compatible with almost any commercially available e-beam gun[4] | — |
| Waveform resolution | 8 bits (0.4%)[4] | — |
| Weight | 10 lbs[4] | — |
| Source listing | — | Temescal UEFC-4900 is named in the Temescal systems navigation/lineup[5] |
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