Comparison ledger
SUSS MicroTec AS 8 Spray, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AS 8 SpraySUSS MicroTec | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | SUSS MicroTec | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec AS 8 | Thermo Fisher 1300 |
| Specifications | ||
| Configuration | Semi Automatic[1] | Class II[4] |
| Conformal Coating | ensures top edge coverage while avoiding resist accumulation in trenches[1] | — |
| Dual Dispense System | up to two separate spray dispense system to prevent cross-contamination[1] | — |
| Touchscreen Interface | equipped with MMC controller software[1] | — |
| Programmable Recipes | all spray and cleaning parameters can be customized and saved[1] | — |
| Operation type | Semi-automatic / semi-automated; manufacturer also describes it as a manual spray coater[1] | — |
| Substrate size | Substrates up to 200mm or 300mm in diameter, and square substrates up to 6" edge length[1] | — |
| Nozzle configuration | Dual Dispense System: up to two separate spray dispense systems to prevent cross-contamination[1] | — |
| Control interface | Touchscreen interface equipped with MMC controller software[1] | — |
| Recipe capability | Programmable recipes: all spray and cleaning parameters can be customized and saved[1] | — |
| Spray nozzle range | Nozzle adjustment from 67.5 mm to 107.5 mm; z-axis adjustment range up to 45 mm[2] | — |
| Spray axis speed | Spray axis velocities up to 500 mm/s and acceleration up to 9 m/s²[2] | — |
| Chuck rotation | Chuck rotation up to 1,000 rpm[2] | — |
| Dual-nozzle / single-nozzle substrate support | Dual-nozzle mode for Ø150 mm and Ø200 mm substrates; single-nozzle mode for Ø3", Ø100 mm, Ø150 mm and Ø200 mm substrates[2] | — |
| Solvent nozzle | Separate solvent nozzle for precise, flexible cleaning and fast recipe execution[2] | — |
| Heated chuck | Heated chuck option available[2] | — |
| Maximum substrate size | 8 inch[3] | — |
| Wafer sizes | Wafer sizes from pieces to 200mm[3] | — |
| Resist types | Common resists sprayed are SU-8, S1800 and various AZ formulations[3] | — |
| Topography capability | Capable of coating 90° corners, KOH etched cavities, Through Silicon Vias (TSVs) or lenses with topographies ranging from a few micron to 600µm or more[3] | — |
| Low viscosity support | Low Viscosity Solutions[1] | — |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[5] |
| Airflow compensation | — | SmartFlow airflow compensation system[5] |
| Motors | — | Dual DC motors[5] |
| Front window design | — | SmartClean front window design[5] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[5] |
| UV light | — | Programmable UV light[5] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[5] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[5] |
| Front opening choices | — | 8-inch or 10-inch front opening[5] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[6] |
| Certification | — | NSF/ANSI 49, UL, CE[6] |
| Service valves | — | Up to 6 total, 3 on each side wall[6] |
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